AMOLF group leader and UvA professor Femius Koenderink has received funding from the NWO Domain Applied and Engineering Sciences for the OTP project entitled ‘Integrated nanophotonic and extreme-ultraviolet access to semiconductor metrology’ (NANOXUV). Koenderink is thrilled to start his research project together with Peter Kraus (ARCNL) and industrial partner ASML. NWO has assigned 1 million euro to the NANOXUV project.
About NANOXUV
The miniaturization of microelectronics continues to advance at a rapid pace. This makes it increasingly difficult to visualize the smallest produced structures. Being able to see these structures is crucial to help make computer chips faster and their production more efficient, and thus more sustainable. In NANOXUV the researchers will develop novel short-wavelength light sources that visualize the structures. Furthermore, they will embark on designing tailor-made structures that emit short-wavelength radiation themselves, which encodes structural parameters of the generating structure. This project will further extend the collaboration between AMOLF and ARCNL, and builds on earlier joint research on the use of nanophotonics structures for computational imaging and metrology.
The OTP program is open to excellent research aimed at the possible implementation of the results. It enables companies and other organizations to become involved in scientific research that leads to usable knowledge.
Read more about the OTP projects on the NWO website.
