Xenon Difluoride Etching System
Homebuilt xenon difluoride etching system (XeF2)
XeF2 etcher is a system to expose Si samples to XeF2 gas.
The etching is selective
Si : SiO2 => 500 : 1
Si : Si3N4=> 100: 1
AMOLF NanoLab Amsterdam
AMOLF NanoLab Amsterdam is a facility for materials fabrication and characterization down to the nanometer scale. It aims to provide state-of-the art opportunities in nano research, servicing the scientific and engineering community within the greater Amsterdam area.
