Scanning electron microscope
FEI Verios 460 (Verios)
High resolution scanning electron microscope with nanometer resolution.
- Sample size max. diameter 100 mm thickness 20 mm
- Schottky Field Electron Gun (SFEG)
- Electron Current 1pA to 22 nA
- sample landing energy range 50V30kV
- Electron energie monochromator for low energy spread < 0.2 eV
- 100 mm high precision 5 axis piezo stage sample
- NavCam sample navigation
- Energy Dispersive Spectroscopy (EDS) Oxford Xmax 80 mm^2 Silicon Drift Detector
- Elektron Backscatter Diffraction (EBSD) detector
- Homebuilt Electron Beam Induced Current Detector (EBIC) detector
- Plasma Cleaner
- Cryo Cleaner
- Electron detectors: ETD, TLD, MD, iCD, BSD, STEM
AMOLF NanoLab Amsterdam
AMOLF NanoLab Amsterdam is a facility for materials fabrication and characterization down to the nanometer scale. It aims to provide state-of-the art opportunities in nano research, servicing the scientific and engineering community within the greater Amsterdam area.
