Rapid thermal processor
AnnealSys AS-one 100 (RTA)
- A rapid thermal annealing tool
- Max temperature 1450 °C
- Max hold times:
- 30 s at 1450 °C
- 10 minutes at 1200 °C
- 30 minutes at 1100 °C
- Reliable temperature ranges:
- RT – 1000 °C (using thermocouple)
- 150 – 1100 °C (using pyrometer 2)
- 300 – 1450 °C (using pyrometer 1)
- Max 150 °C/s ramp speed.
- Fast cooling option (uncontrolled and only without thermocouple).
- Pressure range: 5E-6 – 1000 mBar.
- Available gases:
- Oxygen (2000 sccm)
- Nitrogen (2000 sccm)
- Argon (2000 sccm)
- 5% Hydrogen in Nitrogen (1000 sccm)
AMOLF NanoLab Amsterdam
AMOLF NanoLab Amsterdam is a facility for materials fabrication and characterization down to the nanometer scale. It aims to provide state-of-the art opportunities in nano research, servicing the scientific and engineering community within the greater Amsterdam area.
