Profilometer
KLA Tencor Stylus Profiler P7 (Profilometer)
Step height measurement tool for 2D and 3D measurements of step heights, surface roughness, sample stress, and sample bowing.
- Minimum substrate size: 3 x 3 mm
- Maximum substrate size: 150mm
- 2-micron radius 60 cone degree angled tip
- 5 – 50 mg stylus constant force
- Vertical resolution 0.4 nm
- Horizontal resolution 25 nm
AMOLF NanoLab Amsterdam
AMOLF NanoLab Amsterdam is a facility for materials fabrication and characterization down to the nanometer scale. It aims to provide state-of-the art opportunities in nano research, servicing the scientific and engineering community within the greater Amsterdam area.
