Polyteknik Flextura M506 E (E-Flex)

Tool for physical vapor deposition of different materials. You can contact the NanoLab staff about available materials. The system is built according to our specifications by Polyteknik.

• Sample size diameter 4” max 4mm thick
• Load lock with separate turbo-pump
• Base pressure ~10-8 mbar (high vacuum; 400 l/s turbo, dry roughing pump)
• Ar etching gas, reactive gas evaporation with N2 and O2
• E-beam 10 kV, 500 mA evaporation source with 8 rotatable crucibles
• 2 thermal sources
• Co-evaporation
• Source to substrate distance 500mm
• 2 Quartz thickness monitors
• Sample heating till 400 °C
• Sample rotation, 360°
• Shutter system for sources and sample
• Linear shutter 100mm resolution 10µm
• Automated recipe driven software