Sputter system physical vapor deposition
Polyteknik Flextura M506 S (S-flex)
Tool for sputtering different materials. You can contact the NanoLab staff about available materials. The system is built according our specifications by Polyteknik.
- Max sample diameter 4”, max 4mm thick
- Load lock
- Base pressure ~10-8 mbar (high vacuum; 400 l/s turbo, dry roughing pump)
- Ar sputter gas, reactive gas N2 and O2
- 4 Polyteknik 3” Magnetrons
- 300W RF power supply
- 2kW DC, uni or bipolar pulse mode power supply
- Co-evaporation possible
- Quartz thickness monitor
- Sample heating till 400 °C
- Sample rotation, 360°
- Shutter system for sources and sample
- Automated recipe driven software
Notes
- Use of adhesives to fix sample(s) is prohibited.
- Use of new material only allowed after additional training, every material behaves different!
AMOLF NanoLab Amsterdam
AMOLF NanoLab Amsterdam is a facility for materials fabrication and characterization down to the nanometer scale. It aims to provide state-of-the art opportunities in nano research, servicing the scientific and engineering community within the greater Amsterdam area.
