Suss MABA6 UV Mask aligner with SCIL (SCIL)

A tool for fabricating nanostructures in which a master pattern is replicated via a stamping process, by molding a liquid material in the inverse shape of the stamp, after which it is solidified. This technique combines the advantages of a soft stamp with a rigid glass carrier for low pattern deformation and best resolution for large area patterning.

• resolution down to sub 50nm on a 6” area
• high aspect ratio structures
• This tool is combined with the UV mask aligner